Laser machining machines and methods for lap welding of workpieces

ABSTRACT

In a laser machining machine ( 1 ) for laser welding of workpieces, in particular for lap welding of DBC structures, comprising a laser beam generator for generating a laser beam and an optical imaging system for imaging the laser beam into a machining plane, according to the invention, the optical imaging system comprises an optical beam-shaping system, which images the laser beam in the machining plane with an imaging depth (Δd) of at least ±2 mm, preferably of at least ±5 mm, in such a way that the radial power density distribution (P r ) of the laser beam is bell-shaped along the imaging depth (Δd) in each plane at right angles to the beam axis and the maximum values (P max ) of these bell-shaped power density distributions (P r ) along the imaging depth (Δd) vary in relation to one another by less than 10%, preferably by less than 5%.

CROSS REFERENCE TO RELATED APPLICATIONS

This application is a continuation of and claims priority under 35U.S.C. § 120 from PCT Application No. PCT/EP2016/072907 filed on Sep.27, 2016, which claims priority from German Application No. DE 10 2015218 564.8, filed on Sep. 28, 2015. The entire contents of each of thesepriority applications are incorporated herein by reference.

TECHNICAL FIELD

This disclosure relates to laser machining machines for laser welding ofworkpieces, such as for lap welding of Direct Bonded Copper (DBC)structures.

BACKGROUND

DE 100 05 593 C1 discloses a method for spot welding of workpieces inwhich an optical system including a focusing lens and a flat conicallens (known as an “axicon”) shapes a laser beam in such a way as toachieve both a large beam spot and an annular energy distribution in thefocal plane that represents the machining plane.

DBC (Direct Bonded Copper) structures are used in high-power electronicsand consist of a multilayer system including a ceramic substrate withcopper tracks running on it. The copper conducts heat and current, whilethe ceramic conducts heat and insulates current. The copper tracks mustbe electrically connected in each case to a terminal contact of copper.This has taken place until now by ultrasonic welding, which however canlead to cracks and a buildup of heat in the ceramic substrate, andtherefore does not produce reliable results. Since in the case of DBCstructures the copper layer on the ceramic is very thin, the weldingprocess must be performed very reliably and with an exactly reproduciblewelding-in depth.

SUMMARY

The present disclosure describes laser machining machines and methodsfor performing very reliable and reproducible welding along the depth aspart of a laser welding process. The disclosure describes laser beamgenerators for generating a laser beam and an optical imaging system forprojecting an image of the laser beam into a machining plane, and alsomethods for laser welding of workpieces, such as for lap welding ofdirect bonded copper (DBC) structures, in a machining plane by a laserbeam.

Advantages are achieved in that the optical imaging system includes anoptical beam-shaping system that images the laser beam in the machiningplane with an imaging depth of at least ±2 mm, typically of at least ±5mm, in such a way that the radial power density distribution of thelaser beam is bell-shaped along the imaging depth in each plane at rightangles to the beam axis and the maximum values of these bell-shapedpower density distributions along the imaging depth vary in relation toone another by less than 10%, typically by less than 5%.

As power measurements have shown, the optical beam-shaping systemproduces a great constancy of the power in the beam direction (zdirection) over several millimeters in the region of the imaging depth,and a bell-shaped power density distribution radially in relation to thebeam direction. These features lead to reproducible in-depth weldingalong the depth.

The reproducible welding depth makes it possible for components having atemperature-critical substructure to be laser-welded. Thus, damage tothe substructure (for example, a ceramic substrate) of electricallyconducting contacts that may otherwise occur during laser weldingbecause of excessively deep weld can be avoided. The disclosure makes itpossible in the case of DBC structures in which the copper layer on theceramic substrate is very thin to have a very reliable welding processwith an exactly reproducible welding depth without destroying theceramic substrate. Because of the bell-shaped power densitydistribution, other advantages of this disclosure include preventing abuildup of heat between the copper components to be welded, as wouldoccur for example with an annular power density distribution.

In some embodiments, the optical beam-shaping system is formed as aconvex or concave axicon, the machining plane lying in an overfocusingregion in front of the focal plane of the optical imaging system in thecase of a convex axicon and lying in an underfocusing region behind thefocal plane in the case of a concave axicon. The axicon may be arrangedin the divergent or parallel path of rays of the laser beam, in thelatter case it being possible for the axicon to be easily additionallyincorporated in many existing optical systems.

In some embodiments, the optical beam-shaping system is formed by adual-focus objective, the machining plane lying between the two foci ofthe dual-focus objective. An optical homogenizing system is typicallyarranged in front of the dual-focus objective which mixes or homogenizesthe radial power density distribution of the laser beam. The opticalhomogenizing system may for example include a light guide (for example alaser light cable), into which the laser beam is directed eccentricallyin relation to the axis of the light guide.

In a further aspect, the disclosure also relates to methods for laserwelding of workpieces, such as for lap welding of DBCs, in a machiningplane by a laser beam, wherein the laser beam is imaged into themachining plane with an imaging depth of at least ±2 mm, e.g., at least±5 mm, in such a way that the radial power density distribution of thelaser beam is bell-shaped along the imaging depth in each plane at rightangles to the beam axis and that the maximum values of these bell-shapedpower density distributions along the imaging depth vary in relation toone another by less than 10%, e.g., by less than 5%.

Workpieces of copper are typically welded to one another with a pulsedgreen laser beam (wavelength of for example 515 nm or 532 nm) or with apulsed IR laser beam.

Further advantages and advantageous refinements of the subject matter ofthe invention emerge from the description, the claims, and the drawings.Similarly, the features mentioned above and features still to be set outcan each be used on their own or together in any desired combinations.The embodiments shown and described should not be understood as anexhaustive list, but rather are of an exemplary character for thedescription of the invention.

DESCRIPTION OF DRAWINGS

FIG. 1 shows a first laser machining machine with an opticalbeam-shaping system in the form of an axicon together with theassociated power density distribution of the laser beam in the radialdirection and in the z direction.

FIG. 2 shows a second laser machining machine with an opticalbeam-shaping system in the form of a light guide and a dual-focusobjective together with the associated power density distribution of thelaser beam in the radial direction and in the z direction.

In the description of the figures that follows, identical referencesigns are used for components that are the same or functionally thesame.

DETAILED DESCRIPTION

The laser machining machine 1 shown in FIG. 1 serves, for example, forlap welding a terminal contact 2 of copper and a copper track 3 of a DBC(Direct Bonded Copper) structure 4 by a pulsed laser beam 5. The DBCstructure 4 has a ceramic substrate 6, on which the copper track 3 isdeposited. Since the copper track 3 on the ceramic substrate 6 is verythin, the laser welding process must be performed very reliably and witha reproducible welding depth (along the z-axis).

The laser machining machine 1 includes a laser beam generator 7 forgenerating the laser beam 5, a laser light cable 8 (LLC), into which thelaser beam 5 is coupled, and also an optical imaging system 9 forimaging the laser beam 5 emerging from the LLC 8 into an imaging plane10, which coincides with the machining plane 10.

The optical imaging system 9 has a collimation lens 11 for collimatingthe laser beam 5 emerging divergently from the LLC 8 and a focusing lens12 for focusing the collimated laser beam 5 into a focal plane 13. Aprotective glass 14 arranged in the focused laser beam 5 protects thefocusing lens 12 from damage. In the divergent laser beam 5, that is tosay between the LLC 8 and the collimation lens 11, an opticalbeam-shaping system in the form of a flat conical lens (known as an“axicon”) 15 is arranged coaxially in relation to the optical axis 16with a flank angle β of for example 0.1°, the conical side facing theLLC 8. The axicon 15 transforms the incident divergent laser beam 5 intoan annular laser beam 5, the outer marginal rays 5 a of which impinge ina collimated manner and the inner marginal rays 5 b of which impinge ina divergent manner on the focusing lens 12. The outer marginal rays 5 aare focused by the focusing lens 12 into the focal plane 13, to bespecific into the focal point F, while the inner marginal rays 5 b arenot influenced by the focusing lens 12. The machining plane 10 lies inan overfocusing region in front of the focal plane 13, for example 20 mmin front of the focal plane 13.

As power measurements have shown, the additional axicon 15 brings aboutthe effect that the laser beam 5 is imaged in the machining plane 10with an imaging depth Δd of at least ±2 mm in such a way that the radialpower density distribution P_(r) of the laser beam 5 is bell-shapedalong the imaging depth Δd in each plane at right angles to the beamaxis. The maximum values P_(max) of these bell-shaped power densitydistributions P_(r) in the direction of the optical axis (z direction)16 along the imaging depth Δd vary in relation to one another by lessthan 5%. The maximum values P_(max) therefore all lie within a 5% bandof variation 17.

In the region of the imaging depth Δd, the laser beam 5 consequently hasa great uniformity of power along its optical axis 16 over severalmillimeters and in each case a bell-shaped radial power densitydistribution P_(r). This leads to a great tolerance of the parameters inthe machining plane 13, with a very exact welding depth, andconsequently a reproducible welding depth. The bell-shaped power densitydistribution P_(r), prevents a buildup of heat between the coppercomponents 2, 3 to be welded.

Alternatively, the axicon 15 may also be arranged in the parallel pathof rays of the laser beam 5, between the collimation lens 11 and thefocusing lens 12.

In FIG. 1, the axicon 15 is formed as a convex axicon, so that themachining plane 10 lies in the overfocusing region in front of the focalplane 13 of the optical imaging system 9. Alternatively, the axicon mayalso be formed as a concave axicon, so that the machining plane 10 liesin an underfocusing region behind the focal plane 13, for example 20 mmbehind the focal plane 13.

The laser machining machine 1 shown in FIG. 2 differs from FIG. 1 inthat here the optical beam-shaping system 9 is formed by an optionaloptical homogenizing system, which has a laser light cable (LLC) 21, anda downstream dual-focus objective 22 with a focal length f₁ in the innerregion, a focal length f₂ in the outer region, with f₁>f₂. The machiningplane 10 lies between the two foci F₁, F₂ of the dual-focus objective22. For the purpose of mixing or homogenizing the radial power densitydistribution, the laser beam 5 is coupled into the LLC 21 eccentricallyin relation to the axis 23 of the LLC. The laser beam 5 emergingdivergently from the LLC 21 impinges on the dual-focus lens 22, whichfocuses the inner bundle of rays 24 a of the laser beam 5 impinging onits inner region to the focus F₁ and focuses the annular bundle 24 b ofthe laser beam 5 impinging on its outer region to the focus F₂.

As power measurements have also shown here, the LLC 21 and thedual-focus objective 22 bring about the effect that the laser beam 5 isimaged in the machining plane 10 with an imaging depth Δd of at least ±2mm in such a way that the radial power density distribution P_(r) of thelaser beam 5 is bell-shaped along the imaging depth Δd in each plane atright angles to the beam axis. The maximum values P_(max) of thesebell-shaped power density distributions P_(r) in the direction of theoptical axis 16 (z direction) along the imaging depth Δd vary inrelation to one another by less than 5%. The maximum values P_(max)therefore all lie within a 5% band of variation 17.

In the region of the imaging depth Δd, the laser beam 5 consequently hasa great uniformity of power along its optical axis 16 over severalmillimeters and in each case a bell-shaped radial power densitydistribution P_(r). This leads to a great tolerance of the parameters inthe machining plane 13, with a very exact welding depth, andconsequently to a reproducible welding depth. The bell-shaped powerdensity distribution P_(r) prevents a buildup of heat between the coppercomponents 2, 3 to be welded.

What is claimed is:
 1. A laser machining machine for laser welding ofworkpieces, comprising: a laser beam generator that generates a laserbeam having a beam axis; and an optical imaging system that directs thelaser beam into a machining plane, wherein the optical imaging systemcomprises an optical beam-shaping system comprising an axicon thattransforms the incident divergent laser beam into an annular laser beam,wherein outer marginal rays of the annular laser beam impinge in acollimated manner and inner marginal rays of the annular laser beamimpinge in a divergent manner on a focusing lens, and wherein the outermarginal rays are focused by the focusing lens into a focal plane, whilethe inner marginal rays are not influenced by the focusing lens, whereinthe optical beam-shaping system is configured to image the laser beam inthe machining plane with an imaging depth (Δd) of at least ±2 mm suchthat a radial power density distribution (P_(r)) of the laser beam isbell-shaped along the imaging depth (Δd) in each plane at right anglesto the laser beam axis, and maximum values (P_(max)) of the bell-shapedpower density distributions (P_(r)) along the imaging depth (Δd) vary inrelation to one another by less than 10%.
 2. The laser machining machineof claim 1, wherein the axicon is convexly formed and the machiningplane lies in an overfocusing region in front of the focal plane of theoptical imaging system.
 3. The laser machining machine of claim 1,wherein the axicon is concavely formed and the machining plane lies inan underfocusing region behind the focal plane of the optical imagingsystem.
 4. The laser machining machine of claim 1, wherein the axicon isarranged in the parallel or divergent path of rays of the laser beam. 5.A laser machining machine for laser welding of workpieces, comprising: alaser beam generator that generates a laser beam having a beam axis; andan optical imaging system that directs the laser beam into a machiningplane, wherein the optical imaging system comprises a dual-focusobjective having two foci between which the machining plane lies,configured to image the laser beam in the machining plane with animaging depth (Δd) of at least ±2 mm such that a radial power densitydistribution (P_(r)) of the laser beam is bell-shaped along the imagingdepth (Δd) in each plane at right angles to the beam axis, and maximumvalues (P_(max)) of the bell-shaped power density distributions (P_(r))along the imaging depth (Δd) vary in relation to one another by lessthan 10%.
 6. The laser machining machine of claim 5, comprising anoptical homogenizing system arranged in front of the dual-focus lens tohomogenize the radial power density distribution of the laser beam. 7.The laser machining machine of claim 6, wherein the optical homogenizingsystem comprises a light guide into which the laser beam is coupledeccentrically with respect to an axis of the light guide.
 8. The lasermachining machine of claim 1, wherein the laser beam is a green pulsedlaser beam.
 9. The laser machining machine of claim 1, wherein theaxicon is configured to image the laser beam in the machining plane withan imaging depth of at least ±5 mm.
 10. The laser machining machine ofclaim 1, wherein the axicon is configured to image the laser beam in themachining plane such that maximum values of the bell-shaped powerdensity distributions along the imaging depth vary in relation to oneanother by less than 5%.
 11. A method for laser welding of workpieces ina machining plane by a laser beam having a beam axis, the methodcomprising imaging the laser beam into the machining plane with animaging depth (Δd) of at least ±2 mm, wherein a radial power densitydistribution (P_(r)) of the laser beam is bell-shaped along the imagingdepth (Δd) in each plane at right angles to the beam axis and maximumvalues (P_(max)) of these bell-shaped power density distributions(P_(r)) along the imaging depth (Δd) vary in relation to one another byless than 10%, wherein the laser beam is imaged onto a Direct BondedCopper (DBC) structure for lap welding.
 12. The method as claimed inclaim 11, wherein the laser beam is a green pulsed laser beam.
 13. Themethod as claimed in claim 11, wherein the laser beam is imaged into themachining plane with an imaging depth of at least ±5 mm.
 14. The methodas claimed in claim 11, wherein the laser beam is imaged into themachining plane such that maximum values of the bell-shaped powerdensity distributions along the imaging depth vary in relation to oneanother by less than 5%.
 15. The laser machining machine of claim 5,wherein the laser beam is a green pulsed laser beam.
 16. The lasermachining machine of claim 5, wherein the dual-focus objective isconfigured to image the laser beam in the machining plane with animaging depth of at least ±5 mm.
 17. The laser machining machine ofclaim 5, wherein the dual-focus objective is configured to image thelaser beam in the machining plane such that maximum values of thebell-shaped power density distributions along the imaging depth vary inrelation to one another by less than 5%.